公开(公告)号：US09360436B2

公开(公告)日：2016-06-07

申请号：US14079568

申请日：2013-11-13

Applicant: Industrial Technology Research Institute

Inventor： Yi-Chen Hsieh ,  Chih-Jung Chiang ,  Fu-Cheng Yang

IPC: G01N21/88 ,  G01N21/21 ,  G02B5/30 ,  G01N21/95

CPC classification number: G01N21/8806 ,  G01N21/21 ,  G01N21/9501 ,  G01N2021/8848 ,  G02B5/3066

Abstract: The disclosure provides an inspection device including a light source module, an image receiving module and a processing unit. The light source module emits a first incident light and a second incident light to a device under test (DUT). The image receiving module receives a first image corresponding to the DUT irradiated by the first incident light, and receives a second image corresponding to the DUT irradiated by the second incident light. The processing unit calculates the contrast ratio of the first image and the second image to obtain a high-contrast image for inspection.

Abstract translation: 本发明提供一种包括光源模块，图像接收模块和处理单元的检查装置。 光源模块向待测器件（DUT）发射第一入射光和第二入射光。 图像接收模块接收与由第一入射光照射的DUT对应的第一图像，并且接收与由第二入射光照射的DUT对应的第二图像。 处理单元计算第一图像和第二图像的对比度，以获得用于检查的高对比度图像。

公开(公告)号：US20140168417A1

公开(公告)日：2014-06-19

申请号：US14079568

申请日：2013-11-13

Applicant: Industrial Technology Research Institute

Inventor： Yi-Chen Hsieh ,  Chih-Jung Chiang ,  Fu-Cheng Yang

IPC: G01N21/88 ,  G02B5/30

CPC classification number: G01N21/8806 ,  G01N21/21 ,  G01N21/9501 ,  G01N2021/8848 ,  G02B5/3066

Abstract: The disclosure provides an inspection device including a light source module, an image receiving module and a processing unit. The light source module emits a first incident light and a second incident light to a device under test (DUT). The image receiving module receives a first image corresponding to the DUT irradiated by the first incident light, and receives a second image corresponding to the DUT irradiated by the second incident light. The processing unit calculates the contrast ratio of the first image and the second image to obtain a high-contrast image for inspection.

Abstract translation: 本发明提供一种包括光源模块，图像接收模块和处理单元的检查装置。 光源模块向待测器件（DUT）发射第一入射光和第二入射光。 图像接收模块接收与由第一入射光照射的DUT对应的第一图像，并且接收与由第二入射光照射的DUT对应的第二图像。 处理单元计算第一图像和第二图像的对比度，以获得用于检查的高对比度图像。