公开(公告)号：US11633695B1

公开(公告)日：2023-04-25

申请号：US17564228

申请日：2021-12-29

Applicant: Industrial Technology Research Institute

Inventor： Chuan-Lin Chang ,  Hong-Ping Lin ,  Shou-Nan Li ,  Jui-Hsiang Cheng ,  Hui-Ya Shih ,  I-Ling Nien

IPC: B01D46/00 ,  B01D46/24 ,  B01D53/46 ,  B01D53/75 ,  B01D53/76 ,  B01D53/86 ,  B01J23/745 ,  B01J35/02

Abstract: A device and method of simultaneously removing flammable gases and nitrous oxide are provided. The device includes a thermal oxidation chamber, a high-temperature resistant dust filter, and a catalyst chamber. The thermal oxidation chamber is configured to receive an exhaust gas from a process tool. The exhaust gas includes flammable gases and nitrous oxide. The thermal oxidation chamber has a first exhaust pipe to emit nitrous oxide and dust generated after the exhaust gas is thermally oxidized. The high-temperature resistant dust filter receives dust and nitrous oxide from the first exhaust pipe, wherein the high-temperature resistant dust filter has a filter fiber net and a second exhaust pipe, and the second exhaust pipe is configured to emit nitrous oxide. The catalyst chamber receives nitrous oxide from the second exhaust pipe, wherein the catalyst chamber has a nitrous oxide decomposition catalyst to decompose nitrous oxide into nitrogen and oxygen.