公开(公告)号：US20240425361A1

公开(公告)日：2024-12-26

申请号：US18672583

申请日：2024-05-23

Applicant: Infineon Technologies AG

Inventor： Björn Oliver Eversmann ,  Christian Bretthauer ,  Marco Haubold ,  Heinrich Guenther Heiss ,  Giuseppe Bernacchia ,  Andreas Wiesbauer ,  Dominik Mayrhofer

IPC: B81B7/00

Abstract: In accordance with an embodiment, A micro electro mechanical system (MEMS) device includes a cavity configured to contain a fluid; a pump configured to generate a pressure to the fluid in the cavity, wherein the pressure is configured to cause the fluid to be emitted from the cavity; a sensor configured to sense an electrical parameter based on an electrical impedance of the pump, and configured to provide a sensor signal based on the electrical parameter; and a controller configured to control an operation of the pump; wherein the controller is configured to process the sensor signal to adapt an operation of the MEMS device or for failure detection.