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公开(公告)号:US11618671B2
公开(公告)日:2023-04-04
申请号:US16989187
申请日:2020-08-10
发明人: Hong Chen , Michael Reinhold , Juergen Roeber , Andreas Wiesbauer
摘要: A device includes a readout circuit coupled between an input node and an output node; a microelectromechanical systems (MEMS) device coupled to the input node; and a first charge controlled clamp circuit coupled between the input node and a first bias node.