公开(公告)号：US20230087922A1

公开(公告)日：2023-03-23

申请号：US17930220

申请日：2022-09-07

Applicant: Infineon Technologies AG

Inventor： Werner Breuer ,  Matic Krivec ,  Markus Meyer ,  Michael Emmert ,  Alexandra Marina Roth ,  Alexander Zoepfl

IPC: G01N27/12 ,  G01N1/44 ,  G01N33/00

Abstract: A temperature-regulated chemi-resistive gas sensor includes a sensor surface including a chemically sensitive sensor layer including an active material for adsorbing and desorbing gas molecules of an analyte gas. A predetermined time-continuous periodic temperature profile is applied for periodically heating the sensor surface. An electrical sensor layer conductance signal is determined and time windows are applied to the sensor layer conductance signal. For one or more of the time windows, discrete frequency spectrum data of the sensor layer conductance signal is obtained, and a current gas concentration of the analyte gas is determined based on the obtained discrete frequency spectrum data.