公开(公告)号：US11664811B2

公开(公告)日：2023-05-30

申请号：US16996109

申请日：2020-08-18

Applicant: Infineon Technologies AG

Inventor： Philipp Stelzer ,  Norbert Druml ,  Christian Steger ,  Andreas Strasser

IPC: G01C3/08 ,  H03L7/099 ,  H03L7/087 ,  G02B26/08 ,  G01S7/4863 ,  G01S7/4865 ,  G01S17/931

CPC classification number: H03L7/0992 ,  G01S7/4863 ,  G01S7/4865 ,  G01S17/931 ,  G02B26/0833 ,  H03L7/087

Abstract: A system for driving a microelectromechanical system (MEMS) oscillating structure includes a phase error detector configured to generate a phase error signal based on measured event times and expected event times of the MEMS oscillating structure oscillating about a rotation axis; a disturbance event detector configured to detect a disturbance event based on the phase error signal and a disturbance threshold value; and a phase frequency detector (PFD) and correction circuit configured to, in response to the detected disturbance event, monitor for a plurality of measured crossing events of the MEMS oscillating structure oscillating about the rotation axis, generate a first compensation signal based on at least a first measured crossing event and a second measured crossing event to correct a frequency of the MEMS oscillating structure, and generate a second compensation signal based on a third measured crossing event to correct a phase of the MEMS oscillating structure.