公开(公告)号：US20230420574A1

公开(公告)日：2023-12-28

申请号：US17847555

申请日：2022-06-23

申请人： Intel Corporation

发明人： Seung Hoon Sung ,  Ashish Agrawal ,  Jack T. Kavalieros ,  Rambert Nahm ,  Natalie Briggs ,  Susmita Ghose ,  Glenn Glass ,  Devin R. Merrill ,  Aaron A. Budrevich ,  Shruti Subramanian ,  Biswajeet Guha ,  William Hsu ,  Adedapo A. Oni ,  Rahul Ramamurthy ,  Anupama Bowonder ,  Hsin-Ying Tseng ,  Rajat K. Paul ,  Marko Radosavljevic

IPC分类号： H01L29/786 ,  H01L29/423 ,  H01L29/06

CPC分类号： H01L29/78696 ,  H01L29/0673 ,  H01L29/42392

摘要： Techniques are provided herein to form semiconductor devices on a substrate with an alternative crystallographic surface orientation. The techniques are particularly useful with respect to gate-all-around and forksheet transistor configurations. A substrate having a (110) crystallographic surface orientation forms the basis for the growth of alternating types of semiconductor layers. Both n-channel and p-channel transistors may be fabricated using silicon nanoribbons formed from some of the alternating semiconductor layers. The crystallographic surface orientation of the Si nanoribbons will reflect the same crystallographic surface orientation of the substrate, which leads to a higher hole mobility across the Si nanoribbons of the p-channel devices and an overall improved CMOS device performance.