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公开(公告)号:US20160247756A1
公开(公告)日:2016-08-25
申请号:US14979304
申请日:2015-12-22
Applicant: Intel Corporation
Inventor: Hongqi Li , Gowrisankar Damarla , Roger Lindsay , Zailong Bian , Jin Lu , Shyam Ramalingam , Prasanna Srinivasan
IPC: H01L23/528 , H01L27/115
CPC classification number: H01L23/528 , H01L27/11524 , H01L27/11529 , H01L27/11556
Abstract: A three dimensional or stacked circuit device includes a conductive channel cap on a conductor channel. The channel cap can be created via selective deposition or other process to prevent polishing down the conductive material to isolate the contacts. The conductor channel extends through a deck of multiple tiers of circuit elements that are activated via a gate. The gate is activated by electrical potential in the conductor channel. The conductive cap on the conductor channel can electrically connect the conductor channel to a bitline or other signal line, and/or to another deck of multiple circuit elements.
Abstract translation: 三维或堆叠电路器件包括在导体通道上的导电通道盖。 可以通过选择性沉积或其它工艺来产生通道盖,以防止抛光导电材料以隔离触点。 导体通道延伸穿过通过门激活的多层电路元件。 门通过导体通道中的电位激活。 导体通道上的导电盖可以将导体通道电连接到位线或其他信号线,和/或电连接到多个电路元件的另一层。
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公开(公告)号:US10319678B2
公开(公告)日:2019-06-11
申请号:US14979304
申请日:2015-12-22
Applicant: Intel Corporation
Inventor: Hongqi Li , Gowrisankar Damarla , Roger Lindsay , Zailong Bian , Jin Lu , Shyam Ramalingam , Prasanna Srinivasan
IPC: H01L23/528 , H01L27/115 , H01L27/11529 , H01L27/11524 , H01L27/11556 , H01L27/11568 , H01L27/11582 , H01L27/06 , H01L27/11578 , H01L27/1157
Abstract: A three dimensional or stacked circuit device includes a conductive channel cap on a conductor channel. The channel cap can be created via selective deposition or other process to prevent polishing down the conductive material to isolate the contacts. The conductor channel extends through a deck of multiple tiers of circuit elements that are activated via a gate. The gate is activated by electrical potential in the conductor channel. The conductive cap on the conductor channel can electrically connect the conductor channel to a bitline or other signal line, and/or to another deck of multiple circuit elements.
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