公开(公告)号：US20160282265A1

公开(公告)日：2016-09-29

申请号：US14669514

申请日：2015-03-26

Applicant: Intel Corporation

Inventor： Xing Su ,  Kadhair Al-Hemyari ,  Kai Wu ,  Grace M. Credo ,  Haisheng Rong ,  Jacob Sendowski

IPC: G01N21/41

CPC classification number: G01N21/7746 ,  G01N21/39 ,  G01N21/553 ,  G01N2021/773 ,  G01N2021/7776

Abstract: An embodiment includes a sensor comprising a substrate die; a photonic ring resonator (RR) on the substrate die; a polymer, on the RR, having an affinity to a chemical analyte; a photonic waveguide on the substrate die and coupled to the RR; a laser, on the substrate die and coupled to the waveguide, to emit optical energy that operates with the RR at a resonance wavelength; and a photodetector, on the substrate die and coupled to the waveguide, to detect a change in refractive index (RI) of the RR operating with the optical energy in response to the polymer coupling to the analyte. Other embodiments are described herein.

Abstract translation: 一个实施例包括一个包括一个基片的传感器; 在衬底裸片上的光子环谐振器（RR）; RR上的聚合物对化学分析物具有亲和性; 衬底上的光子波导管并耦合到RR; 激光器，在基板裸片上并且耦合到波导，以发射与RR在谐振波长下工作的光能; 以及光电检测器，其在所述基板裸片上并耦合到所述波导，以检测响应于与所述分析物的所述聚合物耦合而用所述光能操作的所述RR的折射率（RI）的变化。 本文描述了其它实施例。