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公开(公告)号:US10290569B2
公开(公告)日:2019-05-14
申请号:US15721707
申请日:2017-09-29
Applicant: Intel Corporation
Inventor: Kyle Yazzie , Venkata Suresh R. Guthikonda , Patrick Nardi , Santosh Sankarasubramanian , Kevin Y. Lin , Leigh M. Tribolet , John L. Harper , Pramod Malatkar
IPC: H01L23/49 , H01L23/498 , H01L23/367 , H01L21/50 , H05K1/02 , H01L23/00 , H01L23/52
Abstract: An apparatus, comprising a first platform comprising a first working surface having a first non-planar portion; and a second platform comprising a second working surface having a second non-planar portion, wherein: the second working surface is opposite the first working surface, a distance between the first working surface and the second working surface is adjustable, the first non-planar portion comprises a first curved portion, and the second non-planar portion comprises a second curved portion opposite the first curved portion.