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公开(公告)号:US20220415795A1
公开(公告)日:2022-12-29
申请号:US17358442
申请日:2021-06-25
Applicant: Intel Corporation
Inventor: Mohit Haran , Charles Wallace , Leanord Guler , Sukru Yemenicioglu , Mauro Kobrinsky , Tahir Ghani
IPC: H01L23/528 , H01L29/06 , H01L29/417 , H01L29/423 , H01L29/786 , H01L21/02 , H01L29/40 , H01L29/66
Abstract: Back-side transistor contacts that wrap around a portion of source and/or drain semiconductor bodies, related transistor structures, integrated circuits, systems, and methods of fabrication are disclosed. Such back-side transistor contacts are coupled to a top and a side of the source and/or drain semiconductor and extend to back-side interconnects. Coupling to top and side surfaces of the source and/or drain semiconductor reduces contact resistance and extending the metallization along the side reduces transistor cell size for improve device density.