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公开(公告)号:US20190385300A1
公开(公告)日:2019-12-19
申请号:US16557782
申请日:2019-08-30
Applicant: Intel Corporation
Inventor: Bikram Baidya , Hale Erten , Allan Gu , John A. Swanson , Vivek K. Singh , Abde Ali Hunaid Kagalwalla , Mengfei Yang-Flint
Abstract: A method includes identifying a first geometric pattern that failed a design rule check, identifying a second geometric pattern that passed the design rule check, morphing the first geometric pattern based on the second geometric pattern to generate a morphed geometric pattern, wherein the morphed geometric pattern passes the design rule check, and replacing the first geometric pattern with the morphed geometric pattern.
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公开(公告)号:US11301982B2
公开(公告)日:2022-04-12
申请号:US16557782
申请日:2019-08-30
Applicant: Intel Corporation
Inventor: Bikram Baidya , Hale Erten , Allan Gu , John A. Swanson , Vivek K. Singh , Abde Ali Hunaid Kagalwalla , Mengfei Yang-Flint
Abstract: A method includes identifying a first geometric pattern that failed a design rule check, identifying a second geometric pattern that passed the design rule check, morphing the first geometric pattern based on the second geometric pattern to generate a morphed geometric pattern, wherein the morphed geometric pattern passes the design rule check, and replacing the first geometric pattern with the morphed geometric pattern.
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