公开(公告)号：US20210296225A1

公开(公告)日：2021-09-23

申请号：US16827085

申请日：2020-03-23

Applicant: Intel Corporation

Inventor： Suddhasattwa Nad ,  Ravindranath Mahajan ,  Brandon Marin ,  Jeremy Ecton ,  Mohammad Mamunar Rahman

IPC: H01L23/50 ,  H01L29/06

Abstract: An integrated circuit package comprising an integral structural member embedded within dielectric material and at least partially surrounding a keep-out zone of a co-planar package metallization layer. The integral structural member may increase stiffness of the package without increasing the package z-height. The structural member may comprise a plurality of intersecting elements. Individual structural elements may comprise conductive vias that are non-orthogonal to a plane of the package. An angle of intersection and thickness of the structural elements may be varied to impart more or less local or global rigidity to a package according to a particular package application. Intersecting openings may be patterned in a mask material by exposing a photosensitive material through a half-penta prism. Structural material may be plated or otherwise deposited into the intersecting openings.