公开(公告)号：US20140315332A1

公开(公告)日：2014-10-23

申请号：US14321663

申请日：2014-07-01

Applicant: Intermolecular, Inc.

Inventor： Gustavo A. Pinto ,  Tony P. Chiang ,  Kurt H. Weiner

IPC: H01L21/66

CPC classification number: H01L22/10 ,  H01L21/67005 ,  H01L22/34

Abstract: The present invention provides systems and methods for simultaneous, parallel and/or rapid serial testing of material parameters or other parameters of the result of a process. The testing is typically used for screening different methods or materials to select those methods or materials with desired properties. A reactor structure used to form the materials may consist of an array of small isolated reaction chambers that overlie the substrate so that the substrate forms a bottom surface of each isolated reaction chamber. Test structures are formed on the substrate, where the location of each test structure corresponds to an isolated reaction chamber area of the reaction structure. Test structures are used to measure certain parameters, such as by probing contact pads for each test structure, or such testing may be performed in-situ during processing.

Abstract translation: 本发明提供用于同时，并行和/或快速连续测试材料参数或过程结果的其它参数的系统和方法。 测试通常用于筛选不同的方法或材料以选择具有所需性质的那些方法或材料。 用于形成材料的反应器结构可以由覆盖在基板上的小的分离的反应室的阵列组成，使得基板形成每个分离的反应室的底表面。 在基板上形成测试结构，其中每个测试结构的位置对应于反应结构的分离的反应室区域。 测试结构用于测量某些参数，例如通过探测每个测试结构的接触垫，或者可以在处理期间原位进行这种测试。