公开(公告)号：US20080011735A1

公开(公告)日：2008-01-17

申请号：US11775640

申请日：2007-07-10

申请人： Jae-Hyun YANG ,  Yo-Han AHN ,  Kun-Hyung LEE ,  Gui-Young CHO ,  Hong-Hee JEONG ,  Mi-Ae KIM

发明人： Jae-Hyun YANG ,  Yo-Han AHN ,  Kun-Hyung LEE ,  Gui-Young CHO ,  Hong-Hee JEONG ,  Mi-Ae KIM

IPC分类号： F27D11/00

CPC分类号： F27B17/0025 ,  H01L21/67109 ,  H01L21/67253

摘要： In an embodiment, heat treatment equipment comprises a process tube, an exhaust duct connected to the process tube, and, during operation, exhausting gases present within the process tube. The heat treatment equipment also comprises a hollow pressure control member interposed between the process tube and the exhaust duct, the pressure control member being operatively connected to the process tube and the exhaust duct respectively, and including one or a number of openings. Negative pressure is avoided in the process tube during heat treatment processes so that unwanted gas and impurities cannot enter the process tube from outside.

摘要翻译： 在一个实施例中，热处理设备包括处理管，连接到处理管的排气管道，以及在操作期间排出存在于处理管内的气体。 热处理设备还包括插入处理管和排气管之间的中空压力控制构件，压力控制构件分别可操作地连接到处理管和排气管，并且包括一个或多个开口。 在热处理过程中，在处理管中避免负压，使得不需要的气体和杂质不能从外部进入工艺管。