公开(公告)号：US20060115243A1

公开(公告)日：2006-06-01

申请号：US10534134

申请日：2003-12-01

申请人： Jae-In Jeong ,  Tae-Gyoon Lim

发明人： Jae-In Jeong ,  Tae-Gyoon Lim

IPC分类号： B01D7/00

CPC分类号： C23C14/26 ,  C23C14/243

摘要： Disclosed herein are a resistance-heated boat and a manufacturing method thereof for use in vacuum vapor deposition of a metal evaporant onto a substrate in a resistance heating manner. The boat comprises a graphite block to be formed into a boat, and a protective barrier formed at the graphite surface for preventing the graphite layer from reacting with the metal evaporant. The protective barrier has an aluminum-rich layer, and a nitrogen containing compound layer. According to the present invention, it is possible to achieve stable and continuous evaporation of metals including aluminum.

摘要翻译： 本文公开了一种电阻加热船及其制造方法，用于以电阻加热方式将金属蒸发剂真空蒸镀到基底上。 该船包括形成船的石墨块和形成在石墨表面处的防护屏障，用于防止石墨层与金属蒸发剂反应。 保护屏障具有富铝层和含氮化合物层。 根据本发明，可以实现包括铝在内的金属的稳定和连续的蒸发。