Operational lists for simultaneous wafer scheduling and system event scheduling
    1.
    发明授权
    Operational lists for simultaneous wafer scheduling and system event scheduling 失效
    同步晶片调度和系统事件调度的操作列表

    公开(公告)号:US06889110B1

    公开(公告)日:2005-05-03

    申请号:US09677087

    申请日:2000-09-29

    IPC分类号: G05B19/418 G06F19/00

    摘要: A scheduler handles the various tasks to be performed on a wafer processing system as operations, with each operation having a predefined data structure. Operations that meet a set of requirements are added to an operation list. In the operation list, operations meeting another set of requirements are switched to the active state. Each active operation in the operation list is scheduled to run on the wafer processing system. Using structured operations to perform various tasks improves the extensibility and maintainability of the present scheduler. Further, the present scheduler can schedule several compatible operations at the same time by going through each operation in the operation list, and running those that are in the active state.

    摘要翻译: 调度器处理在晶片处理系统上执行的各种任务作为操作,每个操作具有预定义的数据结构。 满足一组要求的操作将添加到操作列表中。 在操作列表中,满足另一组要求的操作切换到活动状态。 操作列表中的每个活动操作被安排在晶片处理系统上运行。 使用结构化操作来执行各种任务可以提高当前调度程序的可扩展性和可维护性。 此外,本调度器可以通过遍历操作列表中的每个操作并运行处于活动状态的各个操作来同时调度几个兼容操作。

    Module classification approach for moving semiconductor wafers in a wafer processing system
    3.
    发明授权
    Module classification approach for moving semiconductor wafers in a wafer processing system 失效
    用于在晶圆处理系统中移动半导体晶片的模块分类方法

    公开(公告)号:US06560507B1

    公开(公告)日:2003-05-06

    申请号:US09693007

    申请日:2000-10-20

    IPC分类号: G06F700

    CPC分类号: H01L21/67253 Y10S414/135

    摘要: Each module of a wafer processing system is given a classification. Upon receipt of a command to move the wafer to one of the modules, a sequence enumerating the modules to be visited by the wafer before reaching its destination is created. The modules are added to the sequence based on their classification. The wafer is then worked on in each module enumerated in the sequence. By creating the sequence when needed, the number of static files that have to be maintained and stored in the wafer processing system is minimized. Further, creating the sequence at the time it is needed allows the sequence to take advantage of the history of the wafer and thereby eliminate unnecessary steps.

    摘要翻译: 对晶片处理系统的每个模块进行分类。 在接收到将晶片移动到其中一个模块的命令时,创建列出在到达其目的地之前由晶片访问的模块的序列。 这些模块根据它们的分类被添加到序列中。 然后在序列中列举的每个模块中对晶片进行加工。 通过在需要时创建序列,最小化必须维护并存储在晶片处理系统中的静态文件的数量。 此外,在需要时创建序列允许序列利用晶片的历史,从而消除不必要的步骤。