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公开(公告)号：US5663506A
公开(公告)日：1997-09-02
申请号：US517529
申请日：1995-08-21
CPC分类号： G01L9/125 , G01L15/00 , G01L19/02 , G01L9/0075
摘要： A monolithic temperature and pressure transducer having a plurality of capacitive sensors. The capacitors are formed from the same silicon substrate and are equally affected by temperature variations, including temperature gradients.
摘要翻译： 具有多个电容传感器的单片温度和压力传感器。 电容器由相同的硅衬底形成，并受温度变化（包括温度梯度）的等效影响。
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公开(公告)号：US6029524A
公开(公告)日：2000-02-29
申请号：US889707
申请日：1997-07-08
CPC分类号： G01L19/0015 , G01L19/02 , G01L27/005 , G01L9/0019 , G01L9/0073 , G01L9/065 , G01L9/125
摘要： A pressure transducer having a redundant fluid pressure sensor can be used to determine if the pressure transducer needs to be recalibrated. The pressure transducer comprises a fluid pressure sensor for measuring differential pressure. The fluid pressure sensor includes a pair of substantially identical pressure sensors for providing a variable electrical output as a function of a differential fluid pressure and a reference sensor for providing an electrical output independent of the differential fluid pressure. A conditioning circuit is provided for generating a frequency-based signal whose frequency is a function of the electrical output for each fluid pressure sensor. The electrical output of the first and second pressure sensors can be compared to determine whether the pressure transducer needs to be calibrated. In one embodiment, the pressure sensors comprise variable capacitors. The first and second capacitors each have one fixed plate and one movable plate responsive to differential fluid pressure across the movable plate. The reference capacitor has two fixed plates. The first variable, second variable, and reference capacitors are all located in proximity to one another and in communication with the differential fluid pressure. The pressure transducer also includes a switching network connected to the capacitors for selectable connecting at least one of the capacitors to an electronic circuit.
摘要翻译： 可以使用具有冗余流体压力传感器的压力传感器来确定压力传感器是否需要被重新校准。 压力传感器包括用于测量差压的流体压力传感器。 流体压力传感器包括一对基本上相同的压力传感器，用于提供作为差动流体压力的函数的可变电输出和用于提供独立于差动流体压力的电输出的参考传感器。 提供调理电路，用于产生频率为每个流体压力传感器的电输出的函数的基于频率的信号。 可以比较第一和第二压力传感器的电气输出，以确定压力传感器是否需要校准。 在一个实施例中，压力传感器包括可变电容器。 第一和第二电容器各自具有一个固定板和一个可移动板，其响应于可移动板上的差动流体压力。 参考电容器有两个固定板。 第一可变，第二可变和参考电容器都位于彼此附近并与差分流体压力通信。 压力传感器还包括连接到电容器的开关网络，用于将电容器中的至少一个可选地连接到电子电路。
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公开(公告)号：US5672808A
公开(公告)日：1997-09-30
申请号：US661851
申请日：1996-06-11
CPC分类号： G01L19/0015 , G01L19/02 , G01L27/005 , G01L9/0019 , G01L9/0073 , G01L9/065 , G01L9/125
摘要： A pressure transducer having a redundant fluid pressure sensor can be used to determine if the pressure transducer needs to be recalibrated. The pressure transducer comprises a fluid pressure sensor for measuring differential pressure. The fluid pressure sensor includes a pair of substantially identical pressure sensors for providing a variable electrical output as a function of a differential fluid pressure and a reference sensor for providing an electrical output independent of the differential fluid pressure. A conditioning circuit is provided for generating a frequency-based signal whose frequency is a function of the electrical output for each fluid pressure sensor. The electrical output of the first and second pressure sensors can be compared to determine whether the pressure transducer needs to be calibrated. In one embodiment, the pressure sensors comprise variable capacitors. The first and second capacitors each have one fixed plate and one movable plate responsive to differential fluid pressure across the movable plate. The reference capacitor has two fixed plates. The first variable, second variable, and reference capacitors are all located in proximity to one another and in communication with the differential fluid pressure. The pressure transducer also includes a switching network connected to the capacitors for selectably connecting at least one of the capacitors to an electronic circuit.
摘要翻译： 可以使用具有冗余流体压力传感器的压力传感器来确定压力传感器是否需要被重新校准。 压力传感器包括用于测量差压的流体压力传感器。 流体压力传感器包括一对基本上相同的压力传感器，用于提供作为差动流体压力的函数的可变电输出和用于提供独立于差动流体压力的电输出的参考传感器。 提供调理电路，用于产生频率为每个流体压力传感器的电输出的函数的基于频率的信号。 可以比较第一和第二压力传感器的电气输出，以确定压力传感器是否需要校准。 在一个实施例中，压力传感器包括可变电容器。 第一和第二电容器各自具有一个固定板和一个可移动板，其响应于可移动板上的差动流体压力。 参考电容器有两个固定板。 第一可变，第二可变和参考电容器都位于彼此附近并与差分流体压力通信。 压力传感器还包括连接到电容器的开关网络，用于将至少一个电容器可选地连接到电子电路。
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公开(公告)号：US5804736A
公开(公告)日：1998-09-08
申请号：US790253
申请日：1997-01-27
CPC分类号： G01L19/0015 , G01L19/02 , G01L27/005 , G01L9/0019 , G01L9/0073 , G01L9/065 , G01L9/125
摘要： A pressure transducer having a redundant fluid pressure sensor can be used to determine if the pressure transducer needs to be recalibrated. The pressure transducer comprises a fluid pressure sensor for measuring differential pressure. The fluid pressure sensor includes a pair of substantially identical pressure sensors for providing a variable electrical output as a function of a differential fluid pressure and a reference sensor for providing an electrical output independent of the differential fluid pressure. A conditioning circuit is provided for generating a frequency-based signal whose frequency is a function of the electrical output for each fluid pressure sensor. The electrical output of the first and second pressure sensors can be compared to determine whether the pressure transducer needs to be calibrated. In one embodiment, the pressure sensors comprise variable capacitors. The first and second capacitors each have one fixed plate and one movable plate responsive to differential fluid pressure across the movable plate. The reference capacitor has two fixed plates. The first variable, second variable, and reference capacitors are all located in proximity to one another and in communication with the differential fluid pressure. The pressure transducer also includes a switching network connected to the capacitors for selectably connecting at least one of the capacitors to an electronic circuit.
摘要翻译： 可以使用具有冗余流体压力传感器的压力传感器来确定压力传感器是否需要被重新校准。 压力传感器包括用于测量差压的流体压力传感器。 流体压力传感器包括一对基本上相同的压力传感器，用于提供作为差动流体压力的函数的可变电输出和用于提供独立于差动流体压力的电输出的参考传感器。 提供调理电路，用于产生频率为每个流体压力传感器的电输出的函数的基于频率的信号。 可以比较第一和第二压力传感器的电气输出，以确定压力传感器是否需要校准。 在一个实施例中，压力传感器包括可变电容器。 第一和第二电容器各自具有一个固定板和一个可移动板，其响应于可移动板上的差动流体压力。 参考电容器有两个固定板。 第一可变，第二可变和参考电容器都位于彼此附近并与差分流体压力通信。 压力传感器还包括连接到电容器的开关网络，用于将至少一个电容器可选地连接到电子电路。
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