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1.发明授权Method and system for removing empty carriers from process tools by controlling an association between control jobs and carrier 有权通过控制控制作业和载体之间的关联来从过程工具中移除空载体的方法和系统公开(公告)号：US07974726B2
公开(公告)日：2011-07-05
申请号：US12016425
申请日：2008-01-18
申请人： Jan Rothe , Konrad Rosenbaum
发明人： Jan Rothe , Konrad Rosenbaum
CPC分类号： H01L21/67294 , H01L21/67778 , Y10S414/135
摘要： By providing an under-specified specification for designating a destination carrier in a respective control job or control message, a high degree of flexibility in determining the destination of processed substrates may be obtained, thereby also allowing the removal of a source carrier for enhancing load port availability in complex semiconductor facilities.
摘要翻译： 通过提供用于在相应的控制作业或控制消息中指定目的地载波的指定不足的规范，可以获得确定已处理基板的目的地的高度灵活性，从而也可以移除用于增强载荷端口的源载波 复杂半导体设施的可用性。
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2.发明申请METHOD AND SYSTEM FOR REMOVING EMPTY CARRIERS FROM PROCESS TOOLS BY CONTROLLING AN ASSOCIATION BETWEEN CONTROL JOBS AND CARRIER 有权通过控制工作和承运人之间的协调来从过程工具中移除空运载体的方法和系统公开(公告)号：US20080299684A1
公开(公告)日：2008-12-04
申请号：US12016425
申请日：2008-01-18
申请人： Jan Rothe , Konrad Rosenbaum
发明人： Jan Rothe , Konrad Rosenbaum
IPC分类号： H01L21/02
CPC分类号： H01L21/67294 , H01L21/67778 , Y10S414/135
摘要： By providing an under-specified specification for designating a destination carrier in a respective control job or control message, a high degree of flexibility in determining the destination of processed substrates may be obtained, thereby also allowing the removal of a source carrier for enhancing load port availability in complex semiconductor facilities.
摘要翻译： 通过提供用于在相应的控制作业或控制消息中指定目的地载波的指定不足的规范，可以获得确定已处理基板的目的地的高度灵活性，从而也可以移除用于增强载荷端口的源载波 复杂半导体设施的可用性。
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3.发明申请METHOD AND SYSTEM FOR ANALYZING STANDARD TOOL MESSAGES IN A MANUFACTURING ENVIRONMENT 审中-公开在制造环境中分析标准工具消息的方法和系统公开(公告)号：US20070179650A1
公开(公告)日：2007-08-02
申请号：US11548445
申请日：2006-10-11
申请人： Konrad Rosenbaum , Jan Rothe
发明人： Konrad Rosenbaum , Jan Rothe
IPC分类号： G06F19/00
CPC分类号： G05B19/409 , G05B2219/31455 , G05B2219/45031
摘要： By analyzing process messages exchanged between one or more process tools and a remote host system, the status of the communication may be efficiently monitored. The analysis of the respective process messages may allow interpretation of process messages so as to have increased intelligibility, wherein additionally the process messages may be classified in accordance with one or more predefined criteria. Thus, the detection of even subtle communication inefficiencies may be significantly enhanced.
摘要翻译： 通过分析在一个或多个处理工具和远程主机系统之间交换的过程消息，可以有效地监视通信的状态。 各个处理消息的分析可以允许解释过程消息以便具有增加的可懂度，其中额外的过程消息可以根据一个或多个预定义的标准进行分类。 因此，可以显着增强对甚至微妙的通信效率低下的检测。
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