公开(公告)号：US4023562A

公开(公告)日：1977-05-17

申请号：US609382

申请日：1975-09-02

申请人： Jaroslav Hynecek ,  Wen H. Ko ,  Eugene T. Yon

发明人： Jaroslav Hynecek ,  Wen H. Ko ,  Eugene T. Yon

IPC分类号： A61B5/03 ,  G01L9/00 ,  A61B5/02

CPC分类号： G01L19/0061 ,  A61B5/03 ,  G01L9/0054

摘要： A fluidtight, hermetically sealed, miniature transducer adapted to be inserted into the human body and useful for directly monitoring internal fluid or pneumatic pressures within the human body is disclosed. Semiconductor strain gauge elements constituting a piezoresistive bridge are formed by diffusion on the surface of one side of an integral flexible, rectangular, silicon diaphragm area of a single crystal silicon base. A single crystal silicon cover is eutectically bonded to the base by a metallic laminate seal. The base, cover, and seal define an evacuated fluidtight chamber containing the strain gauge elements. Electrical conductors, which include diffused conductor paths under an insulating oxide layer, extend from the piezoresistive bridge to contact pads outside the fluidtight chamber. The contact pads can be connected to a readout device for electrically measuring the pressure differential between the evacuated chamber and fluid external to the transducer as a function of time.

摘要翻译： 公开了一种易于密封的微型传感器，其适于插入人体内并且可用于直接监测人体内的内部流体或气动压力。 构成压阻电桥的半导体应变计元件通过在单晶硅基底的整体柔性矩形硅膜面积的一侧的表面上扩散而形成。 单晶硅覆盖层通过金属层压密封件与基体共晶结合。 基座，盖子和密封件限定了包含应变计元件的抽真空的流体密封室。 包括在绝缘氧化物层下面的扩散导体路径的电导体从压阻电桥延伸到液密室外的接触焊盘。 接触垫可以连接到读出装置，用于电气测量抽​​真空室与换能器外部的流体之间的压差作为时间的函数。