公开(公告)号：US06947196B2

公开(公告)日：2005-09-20

申请号：US10420285

申请日：2003-04-22

申请人： Jiun Nan Chen ,  Yuh-Hwa Chang ,  Jiann Tyng Tzeng

发明人： Jiun Nan Chen ,  Yuh-Hwa Chang ,  Jiann Tyng Tzeng

IPC分类号： G02B26/08 ,  G02B26/00 ,  H01L21/00

CPC分类号： G02B26/0833

摘要： A double substrate spatial light modulator with an enlarged tilt angle is achieved. The device comprises a mirror attached on one end to a hinge wherein the hinge is attached to support posts adjacent to the mirror and attached to an underlying glass substrate, a trench within the glass substrate adjacent to the support posts wherein the mirror tilts upward from the glass substrate and downward into the trench, and an overlying glass substrate. The trench provides an enlarged tilt angle of mirror motion. This improves optical performance of the mirror projector including contrast ratio and gray scale.

摘要翻译： 实现了具有增大的倾斜角的双基板空间光调制器。 该装置包括在一端连接到铰链的反射镜，其中铰链附接到邻近反射镜的支撑柱并且附接到下面的玻璃基板，玻璃基板内的与支撑柱相邻的沟槽，其中反射镜向上倾斜 玻璃基板并向下进入沟槽，以及上覆的玻璃基板。 沟槽提供了镜面运动的增大的倾斜角。 这提高了镜面投影仪的光学性能，包括对比度和灰度级。