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公开(公告)号:US20130059449A1
公开(公告)日:2013-03-07
申请号:US13223977
申请日:2011-09-01
申请人: John J. HAUTALA , Michael GRAF
发明人: John J. HAUTALA , Michael GRAF
IPC分类号: H01L21/3065
CPC分类号: H01L21/31122 , H01J2237/24528 , H01L21/32136
摘要: A method of etching a substrate is described. In one embodiment, the method includes preparing a mask layer having a pattern formed therein on or above at least a portion of a substrate, etching a feature pattern into the substrate from the pattern in the mask layer using a gas cluster ion beam (GCIB), and controlling a sidewall profile of the feature pattern etched into the substrate by adjusting a beam divergence of the GCIB.
摘要翻译: 描述蚀刻衬底的方法。 在一个实施方案中,该方法包括制备其中在基底的至少一部分上或之上形成的图案的掩模层,使用气体簇离子束(GCIB)从掩模层中的图案将特征图案蚀刻到衬底中, 并且通过调整GCIB的光束发散度来控制蚀刻到衬底中的特征图案的侧壁轮廓。
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2.
公开(公告)号:US20090212586A1
公开(公告)日:2009-08-27
申请号:US12390029
申请日:2009-02-20
申请人: Matthias BLANCK , Michael GRAF , Andreas DORHOFER
发明人: Matthias BLANCK , Michael GRAF , Andreas DORHOFER
IPC分类号: B60R7/04
CPC分类号: B60R7/04 , B60R2011/0007 , Y10T292/0837 , Y10T292/084
摘要: A mounting of a container in a rail pair is provided, which is disposed in a passenger compartment of a motor vehicle, and the rails of the rail pair have substantially horizontally extending guide grooves on the mutually facing sides and a projection is mounted in the container on its side facing the respective rail, and the respective guide groove has a cross section which expands from the groove base and the respective projection has a corresponding cross section which is expanded toward the container.
摘要翻译: 设置在轨道对中的容器的安装,其布置在机动车辆的乘客室中,并且轨道对的轨道在相互面对的侧上具有大致水平延伸的引导槽,并且突起安装在容器中 在其相对的轨道的一侧,相应的引导槽具有从槽基部扩展的横截面,并且相应的突起具有朝向容器膨胀的对应的横截面。
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