公开(公告)号：US07260449B2

公开(公告)日：2007-08-21

申请号：US11212032

申请日：2005-08-25

申请人： Josef Zimmermann ,  Dirk Jacob ,  Adolf Zitzmann

发明人： Josef Zimmermann ,  Dirk Jacob ,  Adolf Zitzmann

IPC分类号： G06F7/00

CPC分类号： B65G51/03 ,  B65G54/00 ,  B65G2203/0233 ,  B65G2203/025 ,  B65G2203/041

摘要： In a device for conveying and positioning structural elements at a conveying track, a structural element is brought into pending state at the conveying track and the conveying track is tilted in conveying direction so that the structural element slides downwards to approach a target point. The position of the structural element is detected. The device further includes a control unit wherein the position of the structural element is detected within a predetermined range of the target point to be reached, and a time, at which the conveying track is tilted and re-tilted at a predetermined angular speed by a predetermined angle, is determined by using a calculation and control algorithm, so that the structural element is intercepted.

摘要翻译： 在用于在输送轨道处输送和定位结构元件的装置中，结构元件在输送轨道处于待处理状态，并且输送轨道在输送方向上倾斜，使得结构元件向下滑动以接近目标点。 检测结构元件的位置。 该装置还包括控制单元，其中在待达到的目标点的预定范围内检测结构元件的位置，并且传送轨道以预定角速度倾斜并重新倾斜的时间由 通过使用计算和控制算法确定预定角度，从而截断结构元件。

公开(公告)号：US20060064199A1

公开(公告)日：2006-03-23

申请号：US11212032

申请日：2005-08-25

申请人： Josef Zimmermann ,  Dirk Jacob ,  Adolf Zitzmann

发明人： Josef Zimmermann ,  Dirk Jacob ,  Adolf Zitzmann

IPC分类号： G06F7/00

CPC分类号： B65G51/03 ,  B65G54/00 ,  B65G2203/0233 ,  B65G2203/025 ,  B65G2203/041

摘要： The present invention relates to a device for conveying structural elements sensitive to touch along a conveying track in a non-contact way. Furthermore, the present invention relates to a device for positioning structural elements sensitive to touch on a conveying track, wherein the device comprises: means for generating a pending state of the structural elements (2) at the conveying track (1), means (3) for tilting the conveying track (1) in conveying direction (5) so that the structural element (2) slides downwards to approach a target point (Z), means (6, 7) for detecting the position of the structural element (2), and a control unit (8), wherein the position of the structural element (2) is detected within a predetermined range (A-B) of the target point (Z) to be reached, and a time, at which the conveying track (1) is tilted and re-tilted at a predetermined angular speed by a predetermined angle, is determined by using a calculation and control algorithm, so that the structural element is intercepted.

摘要翻译： 本发明涉及一种用于以非接触方式沿着传送轨道传送对触摸敏感的结构元件的装置。 此外，本发明涉及一种用于将对触摸敏感的结构元件定位在输送轨道上的装置，其中该装置包括

公开(公告)号：US08794877B2

公开(公告)日：2014-08-05

申请号：US12595359

申请日：2008-04-09

申请人： Michael Schilp ,  Josef Zimmermann ,  Adolf Zitzmann

发明人： Michael Schilp ,  Josef Zimmermann ,  Adolf Zitzmann

IPC分类号： B65G54/00

CPC分类号： B65G54/00 ,  F16C32/0611

摘要： The present invention relates to a device for transporting and holding of touch-sensitive structural elements or materials, the device comprising the following features: At least an oscillatory plate-like take-up 2 for receiving the object to be transported or held, on which at least an oscillation generator 3 is fixed, and at least two supporting members 4, wherein the oscillation generator 3 is arranged on the plate-like take-up 2 at a predetermined position thereof to set the plate-like take-up into flexural vibrations, and the supporting members 4 are arranged at positions where the amplitude of the flexural vibration is lower than the maximum amplitude by at least 50%, and the oscillation generator 3 is operated with a frequency setting the plate-like take-up 2 into vibrations so that the structural elements or the material are (is) levitating in a contact-free way.

摘要翻译： 本发明涉及一种用于传送和保持触摸敏感的结构元件或材料的装置，该装置包括以下特征：至少一个用于接收待运送或保持的物体的振荡板状的卷取装置2， 至少振动发生器3被固定，并且至少两个支撑构件4，其中振荡发生器3在其预定位置处布置在板状卷取装置2上，以将板状卷取物设置成弯曲振动 并且支撑构件4布置在弯曲振幅低于最大振幅的位置处至少50％的位置，并且振荡发生器3以将板状卷绕2的频率设定为振动 使得结构元件或材料以无接触的方式浮动。

公开(公告)号：US20120274011A1

公开(公告)日：2012-11-01

申请号：US13386593

申请日：2010-07-22

申请人： Michael Schilp ,  Josef Zimmermann ,  Adolf Zitzmann

发明人： Michael Schilp ,  Josef Zimmermann ,  Adolf Zitzmann

IPC分类号： B25B11/00

CPC分类号： B65G47/91 ,  B25J15/0616 ,  B65G47/911 ,  B65G49/061 ,  H01L21/6838

摘要： The present invention relates to a vacuum gripper and in particular to a vacuum gripper for gently gripping work-pieces having sensitive surfaces, such as solar cells, wafers, or panels for flat screens, and for gripping heavy glass plates or plates made of other material having a very smooth surface that are stacked on top of each other and should be removed from above, wherein the vacuum gripper has the following characteristics: a straight or curved gripper plate (2), at least one suction opening (3; 3a), which is provided in the gripper plate (2), wherein a workpiece throttle surface (6) is formed around the suction opening (3), at least one recess (4), which is provided in the side of the gripper plate (2) facing the workpiece, outside of the workpiece throttle surface (6) relative to the suction opening (3), and at least one ventilation hole (5), which is provided within each recess (4).

摘要翻译： 本发明涉及一种真空夹具，特别涉及一种用于轻轻夹紧具有敏感表面的工件（如太阳能电池，晶圆或平板）的真空夹具，以及用于夹持由其他材料制成的重玻璃板或板 具有非常光滑的表面，其被堆叠在彼此的顶部并且应该从上方移除，其中真空夹具具有以下特征：直的或弯曲的夹持板（2），至少一个吸入开口（3; 3a） 其设置在所述夹持板（2）中，其中，在所述吸板（3）的周围形成有工件节流面（6），设置在所述夹板（2）侧的至少一个凹部（4） 面对工件，相对于吸入口（3）在工件节流面（6）的外侧，以及设置在每个凹部（4）内的至少一个通气孔（5）。

公开(公告)号：US20110311320A1

公开(公告)日：2011-12-22

申请号：US12595359

申请日：2008-04-09

申请人： Michael Schilp ,  Josef Zimmermann ,  Adolf Zitzmann

发明人： Michael Schilp ,  Josef Zimmermann ,  Adolf Zitzmann

IPC分类号： B65G51/02

CPC分类号： B65G54/00 ,  F16C32/0611

摘要： The present invention relates to a device for transporting and holding of touch-sensitive structural elements or materials, the device comprising the following features: At least an oscillatory plate-like take-up 2 for receiving the object to be transported or held, on which at least an oscillation generator 3 is fixed, and at least two supporting members 4, wherein the oscillation generator 3 is arranged on the plate-like take-up 2 at a predetermined position thereof to set the plate-like take-up into flexural vibrations, and the supporting members 4 are arranged at positions where the amplitude of the flexural vibration is lower than the maximum amplitude by at least 50%, and the oscillation generator 3 is operated with a frequency setting the plate-like take-up 2 into vibrations so that the structural elements or the material are (is) levitating in a contact-free way.

摘要翻译： 本发明涉及一种用于传送和保持触摸敏感的结构元件或材料的装置，该装置包括以下特征：至少一个用于接收待运送或保持的物体的振荡板状的卷取装置2， 至少振动发生器3被固定，并且至少两个支撑构件4，其中振荡发生器3在其预定位置处布置在板状卷取装置2上，以将板状卷取物设置成弯曲振动 并且支撑构件4布置在弯曲振幅低于最大振幅的位置处至少50％的位置，并且振荡发生器3以将板状卷绕2的频率设定为振动 使得结构元件或材料以无接触的方式浮动。

公开(公告)号：US20090014283A1

公开(公告)日：2009-01-15

申请号：US10595786

申请日：2004-11-11

申请人： Josef Zimmermann ,  Adolf Zitzmann ,  Michael Schilp ,  Tobias Bolig

发明人： Josef Zimmermann ,  Adolf Zitzmann ,  Michael Schilp ,  Tobias Bolig

IPC分类号： B65G35/00 ,  G10K11/00

CPC分类号： B65G54/02 ,  B65G54/00

摘要： A device for generating a floating state of an object by sound waves includes a rigid support structure having a top surface for absorbing forces generated by the gravitation or acceleration of the levitating object and perpendicularly acting on the top surface. A thin oscillatory element is arranged in parallel to the top surface. Further provided is a vibration generator for making the thin oscillatory element vibrating and levitating above the top surface so that the object is levitating above the thin oscillatory element without contacting it.

摘要翻译： 通过声波产生物体的浮动状态的装置包括刚性支撑结构，其具有用于吸收由悬浮物体的重力或加速度产生的并垂直作用在顶表面上的力的顶表面。 薄的振荡元件平行于顶表面布置。 还提供了一种振动发生器，用于使薄振荡元件在顶表面上方振动和悬浮，使得物体在薄振荡元件上浮动而不与其接触。

公开(公告)号：US07870946B2

公开(公告)日：2011-01-18

申请号：US10595786

申请日：2004-11-11

申请人： Josef Zimmermann ,  Adolf Zitzmann ,  Michael Schilp ,  Tobias Bolig

发明人： Josef Zimmermann ,  Adolf Zitzmann ,  Michael Schilp ,  Tobias Bolig

IPC分类号： B65G35/00 ,  G10K11/00

CPC分类号： B65G54/02 ,  B65G54/00

摘要： A device for generating a floating state of an object by sound waves includes a rigid support structure having a top surface for absorbing forces generated by the gravitation or acceleration of the levitating object and perpendicularly acting on the top surface. A thin oscillatory element is arranged in parallel to the top surface. Further provided is a vibration generator for making the thin oscillatory element vibrating and levitating above the top surface so that the object is levitating above the thin oscillatory element without contacting it.

摘要翻译： 通过声波产生物体的浮动状态的装置包括刚性支撑结构，其具有用于吸收由悬浮物体的重力或加速度产生的并垂直作用在顶表面上的力的顶表面。 薄的振荡元件平行于顶表面布置。 还提供了一种振动发生器，用于使薄振荡元件在顶表面上方振动和悬浮，使得物体在薄振荡元件上浮动而不与其接触。

公开(公告)号：US20140041186A1

公开(公告)日：2014-02-13

申请号：US13884779

申请日：2011-11-11

申请人： Michael Schilp ,  Adolf Zitzmann ,  Josef Zimmermann

发明人： Michael Schilp ,  Adolf Zitzmann ,  Josef Zimmermann

IPC分类号： C23C16/458 ,  B05B5/08

CPC分类号： C23C16/458 ,  B05B5/082 ,  H01L21/67772 ,  Y10T29/49815

摘要： The present invention relates to a method for loading and unloading a cassette which is used, for example, in plasma coating processes, wherein the following method steps are carried out: a. providing a cassette (1) which can be assembled and disassembled using a disassembly and assembly robot, b. automatic disassembling of the cassette such that the bottoms (2) of the cassette are separated from one another, c. transferring and associating the bottoms (2) to at least one automatic feeding apparatus which populates the bottoms (2) with workpieces to be processed, d. mounting the populated bottoms (2) to the cassette (1), e. transferring the cassette (1) to the process site where the process should be executed, f. executing the process, g. transferring the cassette (1) to the disassembly and assembly robot or to a further disassembly and assembly robot, h. disassembling the cassette in such a way that the bottoms (2) of the cassette are separated from one another, and i. automatic removal of the workpieces being processed.

摘要翻译： 本发明涉及一种用于装载和卸载用于例如等离子体涂覆过程的盒的方法，其中执行以下方法步骤：a。 提供可以使用拆卸和组装机器人组装和拆卸的盒（1），b。 盒的自动拆卸使得盒的底部（2）彼此分离，c。 将底部（2）转移和关联到至少一个自动进给装置，其将待处理的工件填充到底部（2）上，d。 将人造底部（2）安装到盒（1）上，例如， 将盒式磁带（1）传送到应执行过程的处理现场，f。 执行过程，g。 将盒式磁带（1）传送到拆卸和装配机器人，或者转移到另外的拆卸和装配机器人上。 以使得盒的底部（2）彼此分离的方式拆卸盒，并且i。 自动去除正在加工的工件。

公开(公告)号：US20120327402A1

公开(公告)日：2012-12-27

申请号：US12741110

申请日：2008-10-31

申请人： Michael Schilp ,  Josef Zimmermann ,  Adolf Zitzmann

发明人： Michael Schilp ,  Josef Zimmermann ,  Adolf Zitzmann

IPC分类号： G01N21/88

CPC分类号： G01N21/88 ,  G01N21/01 ,  G01N21/8806 ,  G01N21/94 ,  G01N21/9501 ,  G01N2021/0339

摘要： The invention relates to a device for inspecting contact-sensitive planar materials or workpieces, e.g. wafers for the semiconductor industry, solar cells, glasses, FPD substrates, or biologically active substrates for biosensors, as well as materials having contact-sensitive curved surfaces. Said inspection device comprises a support element (1) for supporting a material (3) on the top face of the support element (1), at least one oscillator which is connected to the support element (1) and the oscillation frequency and amplitude of which are selected in such a way as to keep the material (3) hovering on the support element (1), and at least one optical sensor (4). The support element is made of a light-permeable material, and the optical sensor (4) is arranged below the support element (1).

摘要翻译： 本发明涉及一种用于检查接触敏感平面材料或工件的装置，例如， 用于半导体工业的晶片，太阳能电池，玻璃，FPD衬底或用于生物传感器的生物活性衬底，以及具有接触敏感曲面的材料。 所述检查装置包括用于在支撑元件（1）的顶面上支撑材料（3）的支撑元件（1），连接到支撑元件（1）的至少一个振荡器和振荡频率和振幅 其选择为使材料（3）保持在支撑元件（1）上，以及至少一个光学传感器（4）。 支撑元件由透光材料制成，并且光学传感器（4）布置在支撑元件（1）的下方。