公开(公告)号：US06795202B2

公开(公告)日：2004-09-21

申请号：US10712040

申请日：2003-11-14

申请人： Jun Emoto ,  Takeshi Kagaya ,  Kazuo Yamazaki

发明人： Jun Emoto ,  Takeshi Kagaya ,  Kazuo Yamazaki

IPC分类号： G01B1128

CPC分类号： H01L21/67265

摘要： If a plurality of wafers are placed on each shelf of a rack in a pod, some problems will arise in processing processes. In addition, in some apparatus for detecting wafers, driving means having a not so high stability in the speed such as an air-operated cylinder is used for moving the sensor, in order to make the structure simple. In the case that detection is performed while the sensor is moved by such driving means, errors becomes large and it is difficult to detect wafers accurately. The present invention provides a wafer processing apparatus provided with a transmissive wafer detection sensor, a dog having index means and a transmissive sensor for the dog. The wafer processing apparatus calculates the ratio of the duration time of a signal from the transmissive wafer detection sensor and the duration time of a signal from the transmissive sensor for the dog corresponding to the index means and compares the ratio with a threshold value set in advance to determine the number of wafers.

摘要翻译： 如果将多个晶片放置在盒中的架子的每个搁板上，则在处理过程中将出现一些问题。 此外，在某些用于检测晶片的装置中，为了使结构简单，使用了诸如气动缸的速度不稳定的驱动装置来移动传感器。 在通过这种驱动装置移动传感器时执行检测的情况下，误差变大，并且难以准确地检测晶片。 本发明提供了一种具有透射晶片检测传感器，具有指示装置的狗和用于狗的透射传感器的晶片处理装置。 晶片处理装置计算来自透射晶片检测传感器的信号的持续时间与来自与指示装置相对应的狗的透射传感器的信号的持续时间的比率，并将该比率与预先设定的阈值进行比较 以确定晶片的数量。

公开(公告)号：US20050069420A1

公开(公告)日：2005-03-31

申请号：US10948223

申请日：2004-09-24

申请人： Toshihiko Miyajima ,  Takeshi Kagaya ,  Hitoshi Suzuki ,  Mutsuo Sasaki

发明人： Toshihiko Miyajima ,  Takeshi Kagaya ,  Hitoshi Suzuki ,  Mutsuo Sasaki

IPC分类号： H01L21/677 ,  H01L21/00 ,  H01L21/673 ,  F04B1/00

CPC分类号： H01L21/67389 ,  H01L21/67017 ,  H01L21/67393

摘要： A fine pressure fluctuation at short time intervals occurring when a portable type hermetically sealed container is purged is reduced to thereby prevent the deterioration or the like of a seal member due to the pressure fluctuation. In order to achieve this object, a gas flow rate regulating apparatus is disposed in a gas supplying system in a purging system, and pressure in the portable type hermetically sealed container during purge is measured and the result thereof is fed back to thereby control the flow rate of a supplied gas.

摘要翻译： 当便携式密封容器被清除时发生的短时间间隔的精细压力波动被减小，从而防止由于压力波动导致的密封构件的劣化等。 为了达到这个目的，在清洗系统中的气体供给系统中设置有气体流量调节装置，在吹扫时测定便携式气密容器内的压力，并且对其结果进行反馈，从而控制流动 供应气体的速率。

公开(公告)号：US07360346B2

公开(公告)日：2008-04-22

申请号：US10948223

申请日：2004-09-24

申请人： Toshihiko Miyajima ,  Takeshi Kagaya ,  Hitoshi Suzuki ,  Mutsuo Sasaki

发明人： Toshihiko Miyajima ,  Takeshi Kagaya ,  Hitoshi Suzuki ,  Mutsuo Sasaki

IPC分类号： B65B31/02 ,  B65B31/04

CPC分类号： H01L21/67389 ,  H01L21/67017 ,  H01L21/67393

摘要： A fine pressure fluctuation at short time intervals occurring when a portable type hermetically sealed container is purged is reduced to thereby prevent the deterioration or the like of a seal member due to the pressure fluctuation. In order to achieve this object, a gas flow rate regulating apparatus is disposed in a gas supplying system in a purging system, and pressure in the portable type hermetically sealed container during purge is measured and the result thereof is fed back to thereby control the flow rate of a supplied gas.

摘要翻译： 当便携式密封容器被清除时发生的短时间间隔的精细压力波动被减小，从而防止由于压力波动导致的密封构件的劣化等。 为了达到这个目的，在清洗系统中的气体供给系统中设置有气体流量调节装置，在吹扫时测定便携式气密容器内的压力，并且对其结果进行反馈，从而控制流动 供应气体的速率。