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公开(公告)号：US20200279722A1
公开(公告)日：2020-09-03
申请号：US16495123
申请日：2018-11-28
Applicant: KASUGA DENKI, INC. , Japan Aerospace Exploration Agency
Inventor： Nobuo NOMURA , Tomofumi MOGAMI , Kazuki MINEMURA , Daiki KODA , Takato MORISHITA , Satoshi HOSODA , Hitoshi KUNINAKA
Abstract: A charge neutralizer that includes a vacuum chamber which is capable of having a charged object installed therein and includes a high vacuum processing unit that performs vapor deposition, and a plasma generator configured to supply plasma caused by an electron cyclotron resonance to an inside of the vacuum chamber. The plasma generator includes a plasma source configured to generate the plasma, and a flange configured to install the plasma source inside the vacuum chamber.
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