公开(公告)号：US20210132506A1

公开(公告)日：2021-05-06

申请号：US16829486

申请日：2020-03-25

Applicant: KLA Corporation

Inventor： Zefram Marks ,  Gildardo Delgado ,  Karl Olof Johansson ,  Brady Clark

IPC: G03F7/20 ,  C10M105/72

Abstract: A system includes optics for ultraviolet light or electrons. The optics are situated in a chamber and include a surface to control a path of photons or electrons. The system also includes a lubricated component that is distinct from the surface and is situated in the chamber. The lubricated component is lubricated with a lubricant that includes an ionic liquid having a cation and an anion, wherein at least one of the cation or the anion is organic.