公开(公告)号：US20200090904A1

公开(公告)日：2020-03-19

申请号：US16543596

申请日：2019-08-18

Applicant: KLA Corporation

Inventor： Junqing Huang ,  Paul Russell ,  Hucheng Lee ,  Kenong Wu

IPC: H01J37/28 ,  H01J37/244 ,  G01N21/95

Abstract: Methods and systems for detecting defects in a logic region on a wafer are provided. One method includes acquiring information for different types of design-based care areas in a logic region of a wafer. The method also includes designating the different types of the design-based care areas as different types of sub-regions and, for a localized area within the logic region, assigning two or more instances of the sub-regions located in the localized area to a super-region. In addition, the method includes generating one scatter plot for all of the two or more instances of the sub-regions assigned to the super-region. The one scatter plot is generated with different segmentation values for the output corresponding to the different types of the sub-regions. The method further includes detecting defects in the sub-regions based on the one scatter plot.

公开(公告)号：US10923317B2

公开(公告)日：2021-02-16

申请号：US16543596

申请日：2019-08-18

Applicant: KLA Corporation ,  Shan Zhu

Inventor： Junqing Huang ,  Paul Russell ,  Hucheng Lee ,  Kenong Wu

IPC: H01J37/28 ,  G01N21/95 ,  H01J37/244

Abstract: Methods and systems for detecting defects in a logic region on a wafer are provided. One method includes acquiring information for different types of design-based care areas in a logic region of a wafer. The method also includes designating the different types of the design-based care areas as different types of sub-regions and, for a localized area within the logic region, assigning two or more instances of the sub-regions located in the localized area to a super-region. In addition, the method includes generating one scatter plot for all of the two or more instances of the sub-regions assigned to the super-region. The one scatter plot is generated with different segmentation values for the output corresponding to the different types of the sub-regions. The method further includes detecting defects in the sub-regions based on the one scatter plot.