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公开(公告)号:US20200090904A1
公开(公告)日:2020-03-19
申请号:US16543596
申请日:2019-08-18
Applicant: KLA Corporation
Inventor: Junqing Huang , Paul Russell , Hucheng Lee , Kenong Wu
IPC: H01J37/28 , H01J37/244 , G01N21/95
Abstract: Methods and systems for detecting defects in a logic region on a wafer are provided. One method includes acquiring information for different types of design-based care areas in a logic region of a wafer. The method also includes designating the different types of the design-based care areas as different types of sub-regions and, for a localized area within the logic region, assigning two or more instances of the sub-regions located in the localized area to a super-region. In addition, the method includes generating one scatter plot for all of the two or more instances of the sub-regions assigned to the super-region. The one scatter plot is generated with different segmentation values for the output corresponding to the different types of the sub-regions. The method further includes detecting defects in the sub-regions based on the one scatter plot.
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公开(公告)号:US10923317B2
公开(公告)日:2021-02-16
申请号:US16543596
申请日:2019-08-18
Applicant: KLA Corporation , Shan Zhu
Inventor: Junqing Huang , Paul Russell , Hucheng Lee , Kenong Wu
IPC: H01J37/28 , G01N21/95 , H01J37/244
Abstract: Methods and systems for detecting defects in a logic region on a wafer are provided. One method includes acquiring information for different types of design-based care areas in a logic region of a wafer. The method also includes designating the different types of the design-based care areas as different types of sub-regions and, for a localized area within the logic region, assigning two or more instances of the sub-regions located in the localized area to a super-region. In addition, the method includes generating one scatter plot for all of the two or more instances of the sub-regions assigned to the super-region. The one scatter plot is generated with different segmentation values for the output corresponding to the different types of the sub-regions. The method further includes detecting defects in the sub-regions based on the one scatter plot.
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