公开(公告)号：US12051183B2

公开(公告)日：2024-07-30

申请号：US17238106

申请日：2021-04-22

Applicant: KLA Corporation

Inventor： Kedar Grama ,  Santosh Kumar

IPC: G06T7/00 ,  G06N3/04 ,  G06N3/045 ,  G06N20/00

CPC classification number: G06T7/0004 ,  G06N3/045 ,  G06N20/00 ,  G06T2207/20081 ,  G06T2207/20084 ,  G06T2207/30148

Abstract: Methods and systems for determining information for a specimen are provided. The embodiments described herein are configured for training a machine learning (ML) model for generating higher resolution images of a specimen from images of the specimen generated by an inspection subsystem. The training includes a pre-training step that is performed using only simulated images and a re-training step that is performed using actual images of a test specimen. The higher resolution images generated by the trained ML model from lower resolution inspection images can be used for applications to including nuisance filtering and defect classification.

公开(公告)号：US20210343001A1

公开(公告)日：2021-11-04

申请号：US17238106

申请日：2021-04-22

Applicant: KLA Corporation

Inventor： Kedar Grama ,  Santosh Kumar

IPC: G06T7/00 ,  G06N3/04 ,  G06N20/00

Abstract: Methods and systems for determining information for a specimen are provided. The embodiments described herein are configured for training a machine learning (ML) model for generating higher resolution images of a specimen from images of the specimen generated by an inspection subsystem. The training includes a pre-training step that is performed using only simulated images and a re-training step that is performed using actual images of a test specimen. The higher resolution images generated by the trained ML model from lower resolution inspection images can be used for applications to including nuisance filtering and defect classification.