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公开(公告)号：US20240431012A1
公开(公告)日：2024-12-26
申请号：US18743017
申请日：2024-06-13
Applicant: KLA Corporation
Inventor： Sherman Seelinger
Abstract: A cup to hold liquid Xe is disposed in a vacuum chamber. The cup has an open top. A piezoelectric transducer is disposed in the cup to generate acoustic waves through the liquid Xe in the cup. The acoustic waves create liquid Xe droplets that fly out of the cup. A laser may generate laser-beam pulses, which are focused by optics onto respective liquid Xe droplets that have flown out of the cup, to generate EUV light.
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公开(公告)号：US11879683B2
公开(公告)日：2024-01-23
申请号：US17220719
申请日：2021-04-01
Applicant: KLA Corporation
Inventor： Sherman Seelinger , Lauren Wilson
Abstract: A light source includes a rotatable drum, an exhaust tube coupled to the rotatable drum to exhaust nitrogen gas from an interior of the rotatable drum, a feed tube situated within the exhaust tube to provide liquid nitrogen to the interior of the rotatable drum, and a casing to surround at least a portion of the exhaust tube. The light source also includes a rotary air bearing between the exhaust tube and the casing, to allow the exhaust tube to rotate with the rotatable drum.
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公开(公告)号：US20210310717A1
公开(公告)日：2021-10-07
申请号：US17220719
申请日：2021-04-01
Applicant: KLA Corporation
Inventor： Sherman Seelinger , Lauren Wilson
Abstract: A light source includes a rotatable drum, an exhaust tube coupled to the rotatable drum to exhaust nitrogen gas from an interior of the rotatable drum, a feed tube situated within the exhaust tube to provide liquid nitrogen to the interior of the rotatable drum, and a casing to surround at least a portion of the exhaust tube. The light source also includes a rotary air bearing between the exhaust tube and the casing, to allow the exhaust tube to rotate with the rotatable drum.
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