公开(公告)号：US11494924B2

公开(公告)日：2022-11-08

申请号：US17094607

申请日：2020-11-10

Applicant: KLA Corporation

Inventor： Vahid Noormofidi ,  Boshi Huang ,  Ge Cong

IPC: G06T7/33 ,  G06T5/00 ,  G06T7/73 ,  G06V10/25

Abstract: Methods and systems for aligning images of a specimen are provided. One method includes reducing noise in a test image generated for a specimen by an imaging subsystem thereby generating a denoised test image. The method also includes detecting one or more patterned features in the denoised test image extending in at least a horizontal or vertical direction. In addition, the method includes designating an area of the denoised test image in which the detected one or more patterned features are located as a region of interest in the denoised test image. The method further includes aligning the denoised test image to a reference image for the specimen using only the region of interest in the denoised test image and a corresponding area in the reference image.

公开(公告)号：US20210334989A1

公开(公告)日：2021-10-28

申请号：US17094607

申请日：2020-11-10

Applicant: KLA Corporation

Inventor： Vahid Noormofidi ,  Boshi Huang ,  Ge Cong

IPC: G06T7/33 ,  G06K9/32 ,  G06T7/73 ,  G06T5/00

Abstract: Methods and systems for aligning images of a specimen are provided. One method includes reducing noise in a test image generated for a specimen by an imaging subsystem thereby generating a denoised test image. The method also includes detecting one or more patterned features in the denoised test image extending in at least a horizontal or vertical direction. In addition, the method includes designating an area of the denoised test image in which the detected one or more patterned features are located as a region of interest in the denoised test image. The method further includes aligning the denoised test image to a reference image for the specimen using only the region of interest in the denoised test image and a corresponding area in the reference image.