公开(公告)号：US12152316B1

公开(公告)日：2024-11-26

申请号：US17532685

申请日：2021-11-22

Applicant: KLA Corporation

Inventor： Yung-Ho Alex Chuang ,  Vladimir Dribinski

IPC: C30B33/02 ,  C30B7/00 ,  C30B9/00 ,  C30B29/10 ,  C30B29/22 ,  G01N21/95 ,  G01N21/956 ,  G01N21/84 ,  G01N21/87

Abstract: The passivation of a nonlinear optical crystal for use in an inspection tool includes growing a nonlinear optical crystal in the presence of at least one of fluorine, a fluoride ion and a fluoride-containing compound, mechanically preparing the nonlinear optical crystal, performing an annealing process on the nonlinear optical crystal and exposing the nonlinear optical crystal to a hydrogen-containing or deuterium-containing passivating gas.