公开(公告)号：US11043239B2

公开(公告)日：2021-06-22

申请号：US16821192

申请日：2020-03-17

Applicant: KLA Corporation

Inventor： Jun Wang ,  Yaolei Zheng ,  Chunxia Li ,  Changfei Yan ,  Lansheng Dong ,  Yang Zhou ,  Hai-Yang You ,  Haijing Peng ,  Jianou Shi ,  Rui Ni ,  Shankar Krishnan ,  David Y. Wang ,  Walter H. Johnson

IPC: G11B11/105

Abstract: A laser beam is directed through a transmissive axicon telescope or a reflective axicon telescope such as in a magneto-optic Kerr effect metrology system. With the transmissive axicon telescope, a Gaussian beam profile is directed through a first axicon lens and a second axicon lens. The first axicon lens and second axicon lens transfer the Gaussian beam profile of the laser beam to a hollowed laser ring. The laser beam with a hollowed laser ring can be directed through a Schwarzschild reflective objective. With the reflective axicon telescope, the laser beam is directed through two conical mirrors that are fully reflective. One of the conical mirrors defines a central hole that the laser beam passes through.

公开(公告)号：US20200302965A1

公开(公告)日：2020-09-24

申请号：US16821192

申请日：2020-03-17

Applicant: KLA Corporation

Inventor： Jun Wang ,  Yaolei Zheng ,  Chunxia Li ,  Changfei Yan ,  Lansheng Dong ,  Yang Zhou ,  Hai-Yang You ,  Haijing Peng ,  Jianou Shi ,  Rui Ni ,  Shankar Krishnan ,  David Y. Wang ,  Walter H. Johnson ,  Barry Blasenheim

IPC: G11B11/105

Abstract: A laser beam is directed through a transmissive axicon telescope or a reflective axicon telescope such as in a magneto-optic Kerr effect metrology system. With the transmissive axicon telescope, a Gaussian beam profile is directed through a first axicon lens and a second axicon lens. The first axicon lens and second axicon lens transfer the Gaussian beam profile of the laser beam to a hollowed laser ring. The laser beam with a hollowed laser ring can be directed through a Schwarzschild reflective objective. With the reflective axicon telescope, the laser beam is directed through two conical mirrors that are fully reflective. One of the conical mirrors defines a central hole that the laser beam passes through.