公开(公告)号：US10976562B2

公开(公告)日：2021-04-13

申请号：US16138092

申请日：2018-09-21

Applicant: KLA-Tencor Corporation

Inventor： Dmitry Gorelik ,  Andrew V. Hill ,  Ohad Bachar ,  Amnon Manassen ,  Daria Negri

IPC: G02B27/14 ,  G02B27/10 ,  G02B27/09

Abstract: A beamsplitter includes a substrate formed from a material transparent to wavelengths of light at least above a selected cutoff wavelength and reflective structures distributed across a surface of the substrate. The reflective structures split incident light having wavelengths above the selected cutoff wavelength into a reflected beam formed from portions of the incident light reflected from the reflective structures and a transmitted beam formed from portions of the incident light transmitted through the substrate. A splitting ratio of a power of the reflected beam to a power of the transmitted beam is based on a ratio of surface area of the reflective surfaces to an area of the incident light on the substrate. Separation distances between neighboring reflective structures are smaller than the cutoff wavelength such that diffracted power of the incident light having wavelengths above the selected cutoff wavelength is maintained below a selected tolerance.

公开(公告)号：US20190107727A1

公开(公告)日：2019-04-11

申请号：US16138092

申请日：2018-09-21

Applicant: KLA-Tencor Corporation

Inventor： Dmitry Gorelik ,  Andrew V. Hill ,  Ohad Bachar ,  Amnon Manassen ,  Daria Negri

IPC: G02B27/14 ,  G02B27/10 ,  G02B27/09

Abstract: A beamsplitter includes a substrate formed from a material transparent to wavelengths of light at least above a selected cutoff wavelength and reflective structures distributed across a surface of the substrate. The reflective structures split incident light having wavelengths above the selected cutoff wavelength into a reflected beam formed from portions of the incident light reflected from the reflective structures and a transmitted beam formed from portions of the incident light transmitted through the substrate. A splitting ratio of a power of the reflected beam to a power of the transmitted beam is based on a ratio of surface area of the reflective surfaces to an area of the incident light on the substrate. Separation distances between neighboring reflective structures are smaller than the cutoff wavelength such that diffracted power of the incident light having wavelengths above the selected cutoff wavelength is maintained below a selected tolerance.

公开(公告)号：US11118903B2

公开(公告)日：2021-09-14

申请号：US16275085

申请日：2019-02-13

Applicant: KLA-Tencor Corporation

Inventor： Andrew V. Hill ,  Dmitry Gorelik

IPC: G03F7/20 ,  G01B11/27 ,  G02F1/33

Abstract: A multipole illumination system may include an illumination source to generate a source beam, one or more acousto-optic deflectors to diffract the source beam along at least two directions; one or more collection lenses to collect at least some of the diffracted light from the one or more acousto-optic deflectors, and a controller to generate one or more drive signals for the one or more acousto-optic deflectors. For example, the one or more drive signals may cause the one or more acousto-optic deflectors to generate a symmetric distribution of two or more illumination beams formed from light diffracted from the one or more acousto-optic deflectors and collected by the one or more collection lenses, where a distribution of wavelength and intensity of the two or more illumination beams is symmetric in a plane formed by the first and second directions.