公开(公告)号：US09619878B2

公开(公告)日：2017-04-11

申请号：US14251312

申请日：2014-04-11

Applicant: KLA-Tencor Corporation

Inventor： Fred Stanke ,  Ilya Toytman ,  David Alles ,  Gregg Anthony Inderhees ,  Stanley E. Stokowski ,  Mehdi Vaez-Iravani

IPC: G06K9/00 ,  G06T7/00 ,  G01N21/956

CPC classification number: G06T7/001 ,  G01N21/956 ,  G01N2021/95676 ,  G06K9/00 ,  G06T2207/10056 ,  G06T2207/30148

Abstract: Optical inspection methods and apparatus for high-resolution photomasks using only a test image. A filter is applied to an image signal received from radiation that is transmitted by or reflected from a photomask having a test image. The filter may be implemented using programmed control to adjust and control filter conditions, illumination conditions, and magnification conditions.

公开(公告)号：US20140307943A1

公开(公告)日：2014-10-16

申请号：US14251312

申请日：2014-04-11

Applicant: KLA-Tencor Corporation

Inventor： Fred Stanke ,  Ilya Toytman ,  David Alles ,  Gregg Anthony Inderhees ,  Stanley E. Stokowski ,  Mehdi Vaez-Iravani

IPC: G06T7/00 ,  G01N21/95

CPC classification number: G06T7/001 ,  G01N21/956 ,  G01N2021/95676 ,  G06K9/00 ,  G06T2207/10056 ,  G06T2207/30148

Abstract: Optical inspection methods and apparatus for high-resolution photomasks using only a test image. A filter is applied to an image signal received from radiation that is transmitted by or reflected from a photomask having a test image. The filter may be implemented using programmed control to adjust and control filter conditions, illumination conditions, and magnification conditions.

Abstract translation: 仅使用测试图像的高分辨率光掩模的光学检测方法和设备。 将滤波器应用于从具有测试图像的光掩模透射或反射的辐射接收的图像信号。 滤波器可以使用编程控制来实现，以调节和控制滤波器条件，照明条件和放大条件。