公开(公告)号：US10732130B2

公开(公告)日：2020-08-04

申请号：US16165742

申请日：2018-10-19

Applicant: KLA-Tencor Corporation

Inventor： Haiping Zhang ,  Gang Yu

IPC: G01N21/956 ,  H01L21/66 ,  G01N21/95 ,  G01N21/88 ,  G01N21/47

Abstract: An inspection system may include an illumination source to generate an illumination beam, illumination optics to direct the illumination beam to a sample. The system may further include a first collection channel to collect light from the sample within a first range of solid angles and at a first selected polarization. The system may further include a second collection channel to collect light from the sample within a second angular range, the second range of solid angles and at a second selected polarization. The system may further include a controller to receive two or more scattering signals. The scattering signals may include signals from the first and second collection channels having selected polarizations. The controller may further determine depths of defects in the sample based on comparing the two or more scattering signals to training data including data from a training sample having known defects at known depths.

公开(公告)号：US20190383754A1

公开(公告)日：2019-12-19

申请号：US16165742

申请日：2018-10-19

Applicant: KLA-Tencor Corporation

Inventor： Haiping Zhang ,  Gang Yu

IPC: G01N21/956 ,  H01L21/66 ,  G01N21/95 ,  G01N21/47 ,  G01N21/88

Abstract: An inspection system may include an illumination source to generate an illumination beam, illumination optics to direct the illumination beam to a sample. The system may further include a first collection channel to collect light from the sample within a first range of solid angles and at a first selected polarization. The system may further include a second collection channel to collect light from the sample within a second angular range, the second range of solid angles and at a second selected polarization. The system may further include a controller to receive two or more scattering signals. The scattering signals may include signals from the first and second collection channels having selected polarizations. The controller may further determine depths of defects in the sample based on comparing the two or more scattering signals to training data including data from a training sample having known defects at known depths.