公开(公告)号：US20140354983A1

公开(公告)日：2014-12-04

申请号：US14075488

申请日：2013-11-08

Applicant: KLA-Tencor Corporation

Inventor： Pavel Kolchin ,  Richard Wallingford ,  Lisheng Gao ,  Grace H. Chen ,  Markus b. Huber ,  Robert M. Danen

IPC: G01N21/88 ,  G01N21/95

CPC classification number: G01N21/9501

Abstract: Disclosed are methods and apparatus for optimizing a mode of an inspection tool. A first image or signal for each of a plurality of first apertures of the inspection tool is obtained, and each first image or signal pertains to a defect area. For each of a plurality of combinations of the first apertures and their first images or signals, a composite image or signal is obtained. Each composite image or signal is analyzed to determine an optimum one of the combinations of the first apertures based on a defect detection characteristic of each composite image.

Abstract translation: 公开了用于优化检查工具的模式的方法和装置。 获得检查工具的多个第一孔的每一个的第一图像或信号，并且每个第一图像或信号属于缺陷区域。 对于第一孔径及其第一图像或信号的多个组合中的每一个，获得合成图像或信号。 基于每个合成图像的缺陷检测特性，分析每个复合图像或信号以确定第一孔径的组合中的最佳一个。