公开(公告)号：US20190226960A1

公开(公告)日：2019-07-25

申请号：US16247012

申请日：2019-01-14

申请人： KLA-Tencor Corporation

发明人： Warren C. Oliver ,  Kermit H. Parks ,  Kurt Johanns ,  P. Sudharshan Phani ,  John B. Pethica

IPC分类号： G01N3/42 ,  B82Y15/00

摘要： A two-dimensional nanoindentation measurement apparatus includes a first actuator that imparts a first force in a first direction, and a second actuator that imparts a second force in a second direction orthogonal to the first direction. A first elongate member has a first end attached to the first actuator and a second end attached to an indenter tip that engages the surface of the sample. A second elongate member includes a first end attached to the second actuator and a second end connected to the second end of the first elongate member. The first elongate member is rigid in the first direction and compliant in the second direction, and the second elongate member is rigid in the second direction and compliant in the first direction. The first force is imparted to the indenter tip in the first direction through the first elongate member, and the second force is imparted to the indenter tip in the second direction through the second elongate member.

公开(公告)号：US10996152B2

公开(公告)日：2021-05-04

申请号：US16247012

申请日：2019-01-14

申请人： KLA-Tencor Corporation

发明人： Warren C. Oliver ,  Kermit H. Parks ,  Kurt Johanns ,  P. Sudharshan Phani ,  John B. Pethica

IPC分类号： G01N3/42 ,  B82Y15/00 ,  G01Q60/36

摘要： A two-dimensional nanoindentation measurement apparatus includes a first actuator that imparts a first force in a first direction, and a second actuator that imparts a second force in a second direction orthogonal to the first direction. A first elongate member has a first end attached to the first actuator and a second end attached to an indenter tip that engages the surface of the sample. A second elongate member includes a first end attached to the second actuator and a second end connected to the second end of the first elongate member. The first elongate member is rigid in the first direction and compliant in the second direction, and the second elongate member is rigid in the second direction and compliant in the first direction. The first force is imparted to the indenter tip in the first direction through the first elongate member, and the second force is imparted to the indenter tip in the second direction through the second elongate member.