公开(公告)号：US20200080943A1

公开(公告)日：2020-03-12

申请号：US16147558

申请日：2018-09-28

Applicant: KLA-Tencor Corporation

Inventor： Yu Zheng

IPC: G01N21/88 ,  G02B5/20

Abstract: A light attenuating device includes a housing, a first filter, a first motor configured to move the first filter, and a pneumatic actuator configured to move the first filter to either be in contact with the housing or to not be in contact with the housing. The filter includes multiple slit openings that vary in width such that the amount of light that passes through the multiple slit openings varies as the first filter is moved. The light attenuating device may also include a second filter and a second motor configured to move the second filter. A method of light attenuation is also disclosed that includes adjusting the position of a filter such that a portion of the filter is irradiated by a radiating beam, and while maintaining the irradiation of the portion of the filter, moving the filter to be in contact with a thermally conductive object.