公开(公告)号：US20040175028A1

公开(公告)日：2004-09-09

申请号：US10379236

申请日：2003-03-03

Applicant: KLA-Tencor Technologies Corporation

Inventor： Daniel L. Cavan

IPC: G06K009/00

CPC classification number: G06T3/4069 ,  G06T2207/30148

Abstract: A surface inspection apparatus in accordance with the principles of the invention includes an optical system having a plurality of time delay integration (TDI) sensors. The plurality of TDI sensors are arranged to generate a plurality of images of an object so that the images are offset a sub-pixel distance from each other. A scanning element enables the TDI sensors to scan the object so successive images of the object can be generated. Image processing circuitry is used to process the plurality of successive images together to produce a reconstructed image of the object having increased pixel density. The embodiments of the invention also include methods for generating reconstructed images from a plurality of TDI images obtained from at least two offset TDI sensors.

Abstract translation: 根据本发明的原理的表面检查装置包括具有多个时间延迟积分（TDI）传感器的光学系统。 多个TDI传感器被布置成生成对象的多个图像，使得图像彼此偏移子像素距离。 扫描元件使TDI传感器能够扫描对象，从而可以生成对象的连续图像。 图像处理电路用于一起处理多个连续图像以产生具有增加的像素密度的对象的重建图像。 本发明的实施例还包括从从至少两个偏移TDI传感器获得的多个TDI图像中生成重建图像的方法。