公开(公告)号：US20190305209A1

公开(公告)日：2019-10-03

申请号：US16302817

申请日：2017-04-25

Applicant: KONICA MINOLTA, INC.

Inventor： Kazunari TADA ,  Naoki SHIMIZU

IPC: H01L41/338 ,  H01L41/18 ,  H01L41/332

Abstract: The present invention provides a piezoelectric element manufacturing method. The manufacturing method is a method of manufacturing a piezoelectric element comprising a piezoelectric body composite in which a piezoelectric body configured from a Pb-based piezoelectric material and a resin are alternately arranged, and comprises a step of etching, using an etching liquid, a plurality of parallel piezoelectric body segments formed by dicing. The etching liquid comprises a liquid which contains 0.1 to 20 mass % of hexafluorosilicic acid.