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公开(公告)号:US20180095261A1
公开(公告)日:2018-04-05
申请号:US15387622
申请日:2016-12-21
Applicant: KOREA BASIC SCIENCE INSTITUTE
Inventor: Ji Yong BAE , kye Sung LEE , Geon Hee KIM , Ki Soo CHANG
Abstract: Provided is a solid immersion lens (SIL) holder for optical axis precision correction of a high resolution optical microscope, equipped with a SIL and an objective lens barrel equipped with a plurality of objective lenses, the SIL holder comprising: a circular flange providing in the middle of the objective lens barrel to be coupled to the SIL holder; a coupling flange formed at one end portion thereof and coupled to the circular flange; a conical tube formed at the other end portion thereof, the SIL being mounted onto a lower end portion of the conical tube, wherein the SIL holder comprises an optical axis adjusting part which adjusts such that the central axis of the SIL approaches the central axis of an objective lens, and the SIL holder comprises an extension/contraction adjusting part which allows the SIL to be very close to a measurement surface of a specimen.