公开(公告)号：US20180143069A1

公开(公告)日：2018-05-24

申请号：US15873803

申请日：2018-01-17

Applicant: KOREA ELECTRONICS TECHNOLOGY INSTITUTE

Inventor： Kunnyun KIM ,  Yeon Hwa KWAK ,  Hae Kwan OH

IPC: G01J1/42 ,  H03H9/02

CPC classification number: G01J1/429 ,  G01J1/42 ,  G01J2001/4446 ,  H01L31/09 ,  H03H9/02976

Abstract: An ultraviolet-ray (UV) sensor is disclosed. In one embodiment, the UV sensor includes a piezoelectric material, a sensing film arranged on the piezoelectric material and senses ultraviolet rays, an elastic wave input unit arranged on one end of the sensing film on the piezoelectric material and provides the sensing film with an elastic wave generated based on an electrical signal and an elastic wave output unit arranged on the other end of the sensing film on the piezoelectric material and senses a change in frequency of the electrical signal generated based on the provided elastic wave. The UV sensor improves sensitivity of the sensor by enabling the particles having large surface areas due to their characteristics to react with a larger amount of ultraviolet rays. the UV sensor can secure price competitiveness since the UV sensor measures a change in frequency of the elastic wave using zinc oxide (ZnO) nanoparticles.

公开(公告)号：US20180143070A1

公开(公告)日：2018-05-24

申请号：US15873845

申请日：2018-01-17

Applicant: KOREA ELECTRONICS TECHNOLOGY INSTITUTE

Inventor： Kunnyun KIM ,  Yeon Hwa KWAK ,  Hae Kwan OH

IPC: G01J1/42 ,  H01L31/09 ,  H01L31/0256 ,  B06B1/06 ,  G01J3/28

CPC classification number: G01J1/429 ,  B06B1/06 ,  G01J1/047 ,  G01J3/0205 ,  G01J3/28 ,  G01J3/2803 ,  G01J5/44 ,  G01V8/00 ,  H01L27/144 ,  H01L31/0256 ,  H01L31/09

Abstract: A multispectral optical sensor is disclosed. In one embodiment, the multispectral optical sensor includes a piezoelectric material, a first sensing layer and a second sensing layer spaced apart from each other on the piezoelectric material and configured to change the propagation speed of the acoustic wave propagated through the piezoelectric material by receiving ultraviolet light and visible light, respectively. The multiple optical sensor further includes a first acoustic wave output part and a second acoustic wave output part disposed on the piezoelectric material respectively corresponding to the first and second sensing layers and configured to generate an electrical signal based on the changed acoustic wave. The multiple optical sensor measures the intensity of ultraviolet and visible light using a single sensor by detecting the change in frequency, and measures the frequency change in the acoustic wave using zinc oxide, gallium nitride), or cadmium sulfide nanoparticles.