公开(公告)号：US20140217404A1

公开(公告)日：2014-08-07

申请号：US14250821

申请日：2014-04-11

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Ho Won JANG ,  Seok Jin YOON ,  Jin Sang KIM ,  Chong Yun KANG ,  Ji Won CHOI ,  Hi Gyu MOON

IPC: G01N27/12

CPC classification number: G01N27/127 ,  B82Y15/00 ,  B82Y40/00

Abstract: The present disclosure provides a gas sensor including: a substrate; an electrode formed on the substrate; and a gas-sensing layer formed on the electrode, wherein the gas-sensing layer is a self-heating nanocolumnar structure having nanocolumns formed on the electrode and inclined with respect to the electrode with an angle of 60-89° and gas diffusion pores formed between the nanocolumns. The gas sensor according to the present disclosure requires no additional heater since it self-heats owing to the nanocolumnar structure and exhibits superior gas sensitivity even when no heat is applied from outside. Also, it can be mounted on mobile devices such as mobile phones because it consumes less power.

Abstract translation: 本公开提供了一种气体传感器，包括：基板; 形成在基板上的电极; 以及形成在所述电极上的气体感测层，其中所述气体感测层是具有在所述电极上形成的纳米柱并且以60-89°的角度相对于所述电极倾斜并且形成气体扩散孔的自加热纳米柱结构 在纳米柱之间。 根据本公开的气体传感器不需要额外的加热器，因为其由于纳米柱状结构而自发加热，并且即使在从外部没有加热时也显示出优异的气体灵敏度。 此外，它可以安装在诸如移动电话的移动设备上，因为它消耗更少的功率。