公开(公告)号：US20250003912A1

公开(公告)日：2025-01-02

申请号：US18746488

申请日：2024-06-18

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Minah SEO ,  Yong-Sang RYU ,  Jinwoo LEE ,  Geon LEE ,  Jongsu LEE

IPC: G01N27/12 ,  G01N27/407

Abstract: The object of the present invention is to provide a nanogap-based hydrogen sensor in which a nanogap is formed on a substrate and a trace amount of hydrogen gas leakage can be detected in a non-contact manner using the nanogap, and a method of manufacturing the same. In order to achieve the above object, the present invention is characterized by including: a metamaterial manufactured by forming a metal nanoslot pattern on a wafer; a catalyst layer deposited on the surface of the metamaterial to form a nanogap inside the metal nanoslot; and a protective layer formed on the catalyst layer to protect the catalyst layer.