公开(公告)号：US11073434B2

公开(公告)日：2021-07-27

申请号：US16703114

申请日：2019-12-04

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Youngsu Cha ,  Ye Rim Lee

IPC: H01L41/29 ,  G01L1/16 ,  G01L5/00 ,  H01L41/047 ,  H01L41/45 ,  H01L41/193 ,  H01L41/113

Abstract: Provided are a method of manufacturing a shear and normal force sensor including fabricating raised and sunken polymers having a plurality of bent parts of bent shapes, forming an electrode pattern on one surface of a piezoelectric element, and embedding the piezoelectric element between the raised and sunken polymers, and a shear and normal force sensor including raised and sunken polymers having a plurality of bent parts of bent shapes, a piezoelectric element embedded between the raised and sunken polymers and having an electrode pattern on one surface, and a flexible printed circuit board (FPCB) embedded between the sunken polymer and the piezoelectric element and electrically connected to the electrode pattern.