公开(公告)号：US20210239666A1

公开(公告)日：2021-08-05

申请号：US17148242

申请日：2021-01-13

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Deok Ha WOO ,  Yusin PAK

IPC: G01N33/00

Abstract: The present disclosure relates to a hydrogen sensor and a method for manufacturing the same, and more particularly, to a hydrogen sensor having a vertical nanogap structure, in which a nanogap is formed below a sensor portion to bring the sensor portion and an electrode into contact with each other when the sensor portion reacts with hydrogen, so as to allow the sensor portion to expand and contract freely without resistance on a substrate, thereby improving hydrogen sensing accuracy, and it is possible to form a precise nanogap with uniformity and reproducibility at a low cost and a method for manufacturing the same.

公开(公告)号：US20240027414A1

公开(公告)日：2024-01-25

申请号：US18107763

申请日：2023-02-09

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Yong-Sang RYU ,  Yusin PAK ,  Jongsu LEE ,  Taehyun KIM ,  Eui-Sang YU

IPC: G01N33/00 ,  G01N21/78 ,  B32B15/04

CPC classification number: G01N33/005 ,  G01N21/78 ,  B32B15/043 ,  G01N2021/7763

Abstract: The disclosure relates to a hydrogen sensing device capable of visually detecting the presence of hydrogen through a color change according to a water-forming reaction by inducing the water-forming reaction between hydrogen and oxygen at the interface between a lower metal layer and a dielectric layer under a structure in which a lower metal layer, a dielectric layer, and an upper metal layer are sequentially stacked, and visually sensing the color change caused by the generated water.