-
公开(公告)号:US11213821B2
公开(公告)日:2022-01-04
申请号:US16323163
申请日:2017-04-10
Inventor: Chae Seung Lim , Jeong Hun Nam
IPC: B01L3/00
Abstract: The present invention relates to a microfluidic device and a manufacturing method therefore and, more particularly, to a microfluidic device comprising: a first substrate layer; a second substrate layer formed on at least one surface of the first substrate layer; and a plurality of transducers formed on the surface of the first substrate layer and embedded in the second substrate layer, wherein the transducer comprises a conductive microfluidic channel. The present invention can provide an elastic wave substrate microfluidic device capable of controlling an elastic wave according to a property of a microparticle and capable of being manufactured without expensive equipment and complicated process procedures.