公开(公告)号：US20220020626A1

公开(公告)日：2022-01-20

申请号：US17279203

申请日：2019-09-24

申请人： KYOCERA Corporation

发明人： Yasuharu TATEYAMA ,  Yoshinori HIRANO ,  Naoya FUJITA ,  Senri TSUJITAKE ,  Shoji KOHSAKA

IPC分类号： H01L21/683 ,  C04B35/119 ,  G01N23/2273

摘要： A semiconductive ceramic member according to the present disclosure contains a plurality of aluminum oxide crystal grains, and a plurality of titanium oxide crystal grains. The total content of aluminum oxide and titanium oxide is 99% by mass or more per 100% by mass of all constituents. The content of the aluminum oxide is 86% by mass or more and 96% by mass or less and the content of the titanium oxide is 4% by mass or more and 14% by mass or less per 100% by mass of the aluminum oxide and the titanium oxide in total. A peak of TiOx (0

公开(公告)号：US20190389771A1

公开(公告)日：2019-12-26

申请号：US16481762

申请日：2018-01-30

申请人： KYOCERA Corporation

发明人： Yasuharu TATEYAMA ,  Shoji KOHSAKA

IPC分类号： C04B35/117 ,  C04B35/626 ,  C04B35/634 ,  C04B35/645 ,  H01L21/673 ,  H01L21/677

摘要： A semiconductive ceramic member includes alumina ceramics containing α-alumina and titanium oxide. The alumina ceramics contains a content of 89-95% by mass of Al in terms of Al2O3, and a content of 5-11% by mass of Ti in terms of TiO2. When a total content of Al in terms of Al2O3 and Ti in terms of TiO2 is taken as 100 parts by mass, the alumina ceramics contains a content of 0.02-0.6 part by mass in total of Ca in terms of CaO and Ce in terms of CeO2 relative to the 100 parts by mass. The member has a bulk density of 3.7 g/cm3 or more and a peak of TiOx (0