MINUTE OBJECT CHARACTERISTICS MEASURING APPARATUS
    2.
    发明申请
    MINUTE OBJECT CHARACTERISTICS MEASURING APPARATUS 有权
    MINUTE对象特性测量设备

    公开(公告)号:US20160187374A1

    公开(公告)日:2016-06-30

    申请号:US14980706

    申请日:2015-12-28

    IPC分类号: G01Q20/00

    CPC分类号: G01H17/00 G01Q20/02

    摘要: A minute object characteristics measuring apparatus is provided. The minute object characteristics measuring apparatus includes a holder, a cantilever, a measuring device, and a driver. The holder holds a minute object. The cantilever faces the minute object held by the holder. The measuring device measures a displacement of the cantilever. The driver drives one of the holder holding the minute object and the cantilever in a direction that the minute object held by the holder and the cantilever are brought close to or drawn away from each other.

    摘要翻译: 提供了一种分钟物体特性测量装置。 微小物体特性测量装置包括支架,悬臂,测量装置和驱动器。 持有人持有一个分钟的对象。 悬臂面对由支架固定的微小物体。 测量装置测量悬臂的位移。 驱动器驱动保持分针物体和悬臂的一个保持器的方向,并且悬臂彼此靠近或被拉开。