公开(公告)号：US4910162A

公开(公告)日：1990-03-20

申请号：US361347

申请日：1989-06-05

申请人： Kazuo Yasaka ,  Yutaka Shinagawa ,  Toru Miyamoto

发明人： Kazuo Yasaka ,  Yutaka Shinagawa ,  Toru Miyamoto

IPC分类号： G11C17/00 ,  G11C16/06 ,  H01L21/768 ,  H01L21/8246 ,  H01L27/112

CPC分类号： H01L27/112 ,  H01L21/76886

摘要： In a semiconductor integrated circuit device, such as a ROM having an instruction program set therein, in which an order for selecting word lines is variously different depending upon written information; a method of manufacture which can shorten a production process after the determination of the instruction program or the circuit arrangement of a decoder without adding to a manufacturing step is disclosed. Concretely, the method comprises the steps of providing selector switch elements which serve to select decode signal lines in accordance with address signals received from pairs of complementary address signal lines, each pair including a true line and a bar line, in a decoder forming region of a semiconductor substrate; providing a conductor film which is connected to input terminals of the selector switch elements and which is extended under regions for forming the true lines and the bar lines; providing an interlayer insulator film on the selector switch elements and the conductor film; forming contact holes in the interlayer insulator film on the conductor film so as to reach the conductor film; and connecting either of the true lines and the bar lines to the conductor film through the contact holes.

摘要翻译： 在诸如其中设置有指令程序的ROM的半导体集成电路器件中，其中用于选择字线的顺序根据书面信息而各不相同; 公开了一种制造方法，其可以在确定指令程序之后缩短生产过程或者在不增加制造步骤的情况下解码解码器的电路布置。 具体地说，该方法包括以下步骤：提供选择器开关元件，该选择器开关元件用于根据从补码地址信号线对中接收的地址信号选择解码信号线，每对互补地址信号线包括真线和条线， 半导体衬底; 提供连接到选择器开关元件的输入端并在用于形成真线和条线的区域下延伸的导体膜; 在选择器开关元件和导体膜上提供层间绝缘膜; 在导体膜上的层间绝缘膜中形成接触孔，以到达导体膜; 并且通过接触孔将真线和条线之一连接到导体膜。

公开(公告)号：US5047825A

公开(公告)日：1991-09-10

申请号：US485598

申请日：1990-02-27

申请人： Kazuo Yasaka ,  Yutaka Shinagawa ,  Toru Miyamoto

发明人： Kazuo Yasaka ,  Yutaka Shinagawa ,  Toru Miyamoto

IPC分类号： H01L21/768 ,  H01L27/112

CPC分类号： H01L27/112 ,  H01L21/76886

摘要： In a semiconductor integrated circuit device, such as a ROM having an instruction program set therein, in which an order for selecting word lines is variously different depending upon written information; a method of manufacture which can shorten a production process after the determination of the instruction program or the circuit arrangement of a decoder without adding to a manufacturing step is disclosed. Concretely, the method comprises the steps of providing selector switch elements which serve to select decode signal lines in accordance with address signals received from pairs of complementary address signal lines, each pair including a true line and a bar line, in a decoder forming region of a semiconductor substrate; providing a conductor film which is connected to input terminals of the selector switch elements and which is extended under regions for forming the true lines and the bar lines; providing an interlayer insulator film on the selector switch elements and the conductor film; forming contact holes in the interlayer insulator film on the conductor film so as to reach the conductor film; and connecting either of the true lines and the bar lines to the conductor film through the contact holes.

摘要翻译： 在诸如其中设置有指令程序的ROM的半导体集成电路器件中，其中用于选择字线的顺序根据书面信息而各不相同; 公开了一种制造方法，其可以在确定指令程序之后缩短生产过程或者在不增加制造步骤的情况下解码解码器的电路布置。 具体地说，该方法包括以下步骤：提供选择器开关元件，该选择器开关元件用于根据从补码地址信号线对中接收的地址信号选择解码信号线，每对互补地址信号线包括真线和条线， 半导体衬底; 提供连接到选择器开关元件的输入端并在用于形成真线和条线的区域下延伸的导体膜; 在选择器开关元件和导体膜上提供层间绝缘膜; 在导体膜上的层间绝缘膜中形成接触孔，以到达导体膜; 并且通过接触孔将真线和条线之一连接到导体膜。